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MEMS
There is an active research program
(m-SET) in the area of MEMS consisting of faculty from mechanical
engineering, chemical engineering, electrical engineering,
chemistry and researchers from the Center for Advanced Microstructures
and Devices. The focus of the m-SET group is on LIGA technology
for the fabrication of high-temperature MEMS systems (metals
and ceramics), and a major application is gas turbine systems.
The group is currently engaged in developing micro-heat exchangers
for cooling systems for gas turbineblades, micro-rotating
seals, MEMS based micro-fuel injector arrays, and modulatedfuel
injectors for active control. This work is supported by DARPA,
AFOSR and NSF. |
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Electroformed
Ni Micro-Heat Exchanger
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Swirl
Chamber. 100 microns.
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Surface-mounted,
HARMS Micro-Heat Exchanger
with
Film Cooling. |
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